TOPCON TECHNOHOUSE CORPORATION

Established in 1982. Business activity : Development, manufacture, sale, and service of optical measurement apparatus, a semiconductor inspection apparatus, etc.

 

 



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TOPCON TECHNOHOUSE CORPORATION

Japan

http://www.topcon-techno.co.jp/en/

Hakuto-Topcon Projection Stepper

 

Projection Stepper for CPU substrate package.
Model : LS-360SB
< Specification >
Plate size : Max 510×610mm
1-shot area : 255×255mm
Resolution : L/S=5/5µm(DFR)
DOF : 150µm
Mask Size : 9inch