Cryochiller

 

 
Company Brooks Automation Inc.
Product Cryochiller
Information

Cryochiller, trapping water vapor via cryosurface in high vacuum system.
The Polycold MaxCool 4000H cryochiller is a closed loop cryogenic refrigeration system that provides up to 4,000 watts of cooling. It can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. The MaxCool 4000H cryochiller is also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing.